JPH0485645U - - Google Patents
Info
- Publication number
- JPH0485645U JPH0485645U JP12972690U JP12972690U JPH0485645U JP H0485645 U JPH0485645 U JP H0485645U JP 12972690 U JP12972690 U JP 12972690U JP 12972690 U JP12972690 U JP 12972690U JP H0485645 U JPH0485645 U JP H0485645U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- thin film
- coated
- diamond thin
- implantation device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12972690U JP2513136Y2 (ja) | 1990-11-30 | 1990-11-30 | イオン注入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12972690U JP2513136Y2 (ja) | 1990-11-30 | 1990-11-30 | イオン注入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0485645U true JPH0485645U (en]) | 1992-07-24 |
| JP2513136Y2 JP2513136Y2 (ja) | 1996-10-02 |
Family
ID=31877117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12972690U Expired - Lifetime JP2513136Y2 (ja) | 1990-11-30 | 1990-11-30 | イオン注入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2513136Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1027565A (ja) * | 1996-07-11 | 1998-01-27 | Nissin Electric Co Ltd | イオン照射装置 |
-
1990
- 1990-11-30 JP JP12972690U patent/JP2513136Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1027565A (ja) * | 1996-07-11 | 1998-01-27 | Nissin Electric Co Ltd | イオン照射装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2513136Y2 (ja) | 1996-10-02 |